Process Equipment


Our strength is to create a custom design for each processing, substrate, and handling need.

As a result of having an innovative approach, in-house engineering, manufacturing and process knowhow, our process equipment enables manufacturing and measurements for high-tech industries.

Our goal is simple; deliver a robust production/R&D platform customized to your needs with the best cost of ownership!

 

PVD thin films

Our strength is to create custom coater design to process/substrate needs. As a result of having an innovative approach, own production and process knowhow, our thin film deposition systems enable manufacturing of optical, reflection, semiconductor and solar devices.

Our goals is simple, deliver a robust production/R&D platform customized to customer needs with the best cost of ownership.

Deposition Techniques used:

  • Sputtering (DC/RF/DC pulsed) with (un)balanced/rotatable magnetrons or combinations
  • E-beam
  • Thermal evaporation
  • PECVD

Our systems:

  • Flexible dimensions scalable to needs
  • Combination of deposition techniques
  • Full automation with easy(own developed) user interface HMI
  • Turbomoleculair/cryo pumpsystems
  • Specific substrate fixturing with possbililty of cooling/heating stages

OCTOCOAT 480 (automotive application)

Balanced sputtering Cr/Al on polymere substrates (substrate temperature < 80degrC) , full production > 1million/substrates/year.
Complete design of coater/fixturing, production and install of the equipment.


As a result of our strong growth in the PVD (thin films) industry, we have launched Orange Thin Films, a manufacturer of customer-specific thin films systems (PVD, PECVD, Evaporation or a combination of techniques).

With our unique approach, we differentiate ourselves from traditional coating companies by designing the equipment around the process (customer-specific) instead of a standard coating system.

For more information, please visit www.orangethinfilms.com
 

 

Heat Treatment

Our strength is to a create custom design to processing and substrate needs.  As a result of having an innovative approach, own production and process knowhow, our heat treatment systems enable manufacturing in the field of sintering, brazing, annealing, degassing of parts in the high tech industry

Our goals is simple, deliver a robust production/R&D platform, customized to your needs with the best cost of ownership.


Heating Techniques used:

  • Ultra clean heating (turbo molecular pumping) with electro polished heating chamber and direct wiring. Max temperature 200degrC
  • Tantalum/wolfram or molybdenum heating elements with temperature up to 1600degrC

Our systems:

  • Flexible dimensions scalable to needs
  • Possibility for heating techniques in combination with e.g. plasma cleaning
  • Manual/Full automation with easy(own developed) user interface HMI
  • Turbo molecular pump systems

Specials

Our strength is to create custom systems to processing and handling needs. Due to our innovative approach, own engineering, own production and process knowhow,  special systems enable products/measurements in a wide field of applications.

Our goals is simple, deliver a robust production/R&D platform customized to customer needs with the best cost of ownership.

Core competences for special equipment

  • Engineering (3D modelling, Fem analyses, Labview automation
  • Production
  • Assembly
  • Testing

Our references:

UHV Cryogenic Tribometer

Main specifications:

Base pressure 10e-8mbar

Temperature: -150 + 150degrC

Ramp:  +/- 1degrC/minute

Rotation: 1,5mm/s -> 150mm/s

Fn up to 1.5N
More info Tribometer:


Space Simulation Chamber -150degrC + 650degrC

Main Specifications:

Dimensions Chamber: Ø1800x2700

Temperature of hot chamber(right side): + 650° C

Temperature of cold chamber (left side): -150° C

Pumping system: 3500l/sec turbomolecular pump + 65m3/h prepump + 500m3/h rootspump

Basepressure: 1x10E-7 mbar

 

RGA (Contamination Control)

Our strength is to create custom design with proven high yield RGA Systems suitable for Grade 2(EUV) measurement of monoparts and assemblies.  As a result of having an innovative approach, own production and process knowhow, our RGA systems are THE standard in measuring EUV parts.

Our goals is simple, deliver a robust production/R&D platform, customized to your needs with the best cost of ownership.

Techniques used:

  • OEM high performance proven production parts used (RGA, sensors and pumps)
  • NIST Traceable calibration leak used with mixture of Helium Argon Krypon and Xenon for optimum check of performance of system (automatic insitu validation of performance tool)
  • High performance measurement for Grade 2 on Water (H20), Carbon Hydrons volatile (Mass 45-100) and carbon Hydrons non-volatile (Mass 101-200)

Our systems:

  • Flexible dimensions scalable to needs (big parts in big chamber, small parts in small chamber)
  • Regeneration of tool @ 120DegrC with convective heating
  • Temperature stability during measurement always 20DegrC with smart convective cooling of system
  • Full automatic measurement with creating recipes to perform measurement with easy (own developed) user interface HMI
  • Logging in SQL database and full automatic reports (.pdf)
  • SPC (Statistical process control) to check stability of measurement in time